Field emission from silicon tips with carbon coatings deposited by vhf cvd at low temperature t s 225c has been studied emission was measured from both single tips and tip arrays. R e stallcup ii and j m perez uhv stm of cesium on oxygenated epitaxial diamond 100 films in materials issues in vacuum microelectronics materials research society symposium proceedings volume 509 mrs warrendale 1998 pp 161 164. Mrs books on materials reliability in microelectronics have become the snapshot of progress in this field reduced feature size increased speed and larger area are all factors contributing to the continual performance and functionality improvements in integrated circuit technology. Get this from a library materials issues in vacuum microelectronics symposium held april 13 16 1998 san francisco california usa wei zhu. Electron emissive materials vacuum microelectronics and flat panel displays volume 621 mrs proceedings 978 1 55899 559 8 shefford p baker robert f cook sean g corcoran neville r moody
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